SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                            SCHEDULE 14A INFORMATION

                Proxy Statement Pursuant to Section 14(a) of the
                         Securities Exchange Act of 1934

Filed by the Registrant [X]
Filed by a Party other than the Registrant [ ]

Check the appropriate box:
[ ]  Preliminary Proxy Statement              [ ]  Confidential, For Use of the
[X]  Definitive Proxy Statement                    Commission Only (as permitted
[ ]  Definitive Additional Materials               by Rule 14a-6(e)(2))
[ ]  Soliciting Material under Rule 14a-12

                              AMTECH SYSTEMS, INC.
                (Name of Registrant as Specified in Its Charter)


    (Name of Person(s) Filing Proxy Statement, if other than the registrant)

Payment of Filing Fee (Check the appropriate box):
[X]  No fee required.

[ ]  Fee computed on table below per Exchange Act Rules 14a-6(i)(1) and 0-11.

1)   Title of each class of securities to which transaction applies:

--------------------------------------------------------------------------------
2)   Aggregate number of securities to which transaction applies:

--------------------------------------------------------------------------------
3)   Per unit price or other underlying value of transaction  computed  pursuant
     to Exchange  Act Rule 0-11 (set forth the amount on which the filing fee is
     calculated and state how it was determined):

--------------------------------------------------------------------------------
4)   Proposed maximum aggregate value of transaction:

--------------------------------------------------------------------------------
5)   Total fee paid:

--------------------------------------------------------------------------------
[ ]  Fee paid previously with preliminary materials:

--------------------------------------------------------------------------------
[ ]  Check box if any part of the fee is offset as provided by Exchange Act Rule
     0-11(a)(2)  and identify the filing for which the  offsetting  fee was paid
     previously.  Identify the previous filing by registration statement number,
     or the form or schedule and the date of its filing.

     1)   Amount previously paid:

          ----------------------------------------------------------------------
     2)   Form, Schedule or Registration Statement No.:

          ----------------------------------------------------------------------
     3)   Filing Party:

          ----------------------------------------------------------------------
     4)   Date Filed:

          ----------------------------------------------------------------------

                              AMTECH SYSTEMS, INC.
                              131 SOUTH CLARK DRIVE
                              TEMPE, ARIZONA 85281


                    NOTICE OF ANNUAL MEETING OF SHAREHOLDERS
                         TO BE HELD ON FEBRUARY 28, 2003


Dear Shareholder:

     The 2003 Annual Meeting of Shareholders of AMTECH SYSTEMS, INC., an Arizona
corporation (the  "Company"),  will be held at the Hilton Phoenix Airport Hotel,
2435 South 47th Street, Phoenix, Arizona, on Friday, February 28, 2003, at 10:00
a.m., Phoenix, Arizona time, for the following purposes:

     1.   To elect four (4) directors to serve for one-year terms or until their
          successors are elected and qualified;

     2.   To  transact  such other  business  as may  properly  come  before the
          meeting.

     The  foregoing  items of  business  are more fully  described  in the Proxy
Statement  accompanying this notice.  The Company is presently aware of no other
business to come before the annual meeting.

     The Board of Directors has fixed the close of business on January 13, 2003,
as the record date (the "Record  Date") for the  determination  of  shareholders
entitled to notice of and to vote at the annual meeting or any  postponement  or
adjournment  thereof.  Shareholders  are  reminded  that  their  shares  of  the
Company's  common  stock  can be voted at the  annual  meeting  only if they are
present  at the  annual  meeting  in  person  or by valid  proxy.  A copy of the
Company's 2002 Annual Report,  which includes our audited financial  statements,
was mailed with this Notice and Proxy Statement to all shareholders of record on
the Record Date.

     Management  of the  Company  cordially  invites  you to attend  the  Annual
Meeting.  Your  attention  is directed to the  attached  Proxy  Statement  for a
discussion of the foregoing  proposal and the reasons why the Board of Directors
encourages you to vote for approval of such proposal.

                                        By Order of the Board of Directors

                                        /s/ Robert T. Hass

                                        Robert T. Hass, Secretary
Tempe, Arizona
January 24, 2003

IMPORTANT:  IT IS  IMPORTANT  THAT YOUR  SHAREHOLDINGS  BE  REPRESENTED  AT THIS
MEETING.  PLEASE COMPLETE,  DATE, SIGN AND PROMPTLY MAIL THE ENCLOSED PROXY CARD
IN THE ACCOMPANYING ENVELOPE,  WHICH REQUIRES NO POSTAGE IF MAILED IN THE UNITED
STATES.

                              AMTECH SYSTEMS, INC.
                              131 SOUTH CLARK DRIVE
                              TEMPE, ARIZONA 85281

                                 PROXY STATEMENT

     This Proxy  Statement is being furnished to shareholders of Amtech Systems,
Inc.,  an  Arizona   corporation  (the   "Company"),   in  connection  with  the
solicitation  of proxies by our Board of  Directors  for use at the 2003  Annual
Meeting of Shareholders of the Company to be held on Friday,  February 28, 2003,
at 10:00 a.m.,  Phoenix,  Arizona  time,  and any  adjournment  or  postponement
thereof (the "Annual Meeting").  A copy of the Notice of the Meeting accompanies
this Proxy Statement.  This Proxy Statement and the  accompanying  form of Proxy
were first mailed on or about January 24, 2003 to all  shareholders  entitled to
vote at the Annual Meeting.

STOCKHOLDERS ENTITLED TO VOTE

     Shareholders  of record at the close of  business  on January 13, 2003 (the
"Record Date"),  are entitled to notice of and to vote at the Annual Meeting and
at any and all adjournments or postponements of the Annual Meeting. At the close
of business on the Record Date, 2,689,571 shares of common stock, $.01 par value
(the "Common  Stock"),  were issued and  outstanding.  Except as set forth below
with  respect to the  ability to  cumulate  votes for  directors,  each share of
Common Stock entitles its owner to one vote. The holders of a majority of shares
entitled to vote at the Annual  Meeting must be present in person or represented
by proxy in order to  constitute  a quorum for all  matters  to come  before the
Annual Meeting.

HOW TO ATTEND THE MEETING

     If you are a  shareholder  of record,  which  means you hold your shares in
your name, you may attend the meeting.  If you own shares in the name of a bank,
broker  or other  holder of record  ("street  name"),  you will need to ask your
broker or bank for a copy of the proxy they  received  from us. You will need to
bring the proxy with you to the Annual Meeting.

HOW TO VOTE

     If you are a shareholder of record,  you may vote by mail or in person.  To
vote by mail, sign, date and return your proxy card in the enclosed postage-paid
envelope. All valid proxies received before the Annual Meeting, and not revoked,
will be  exercised.  If you sign and  return  your proxy  card,  but do not give
voting  instructions  and authority to vote is not  specifically  withheld,  the
shares  represented  by that proxy will be voted as  recommended by our Board of
Directors. If you have specified a choice with respect to any matter to be acted
upon, the shares will be voted in accordance with the specifications so made.

     All  stockholders may vote in person at the Annual Meeting (unless they are
street name holders without a legal proxy).  If your shares are held in a street
name,  you will  receive  instructions  from the holder of record  that you must
follow in order for your shares to be validly voted.

     We are not aware of any other matters to be presented at the Annual Meeting
except those described in this Proxy  Statement.  However,  if any other matters
not  described  in this Proxy  Statement  are  properly  presented at the Annual
Meeting,  the proxies will use their own judgment to determine  how to vote your
shares.  If the Annual  Meeting is adjourned,  your Common Stock may be voted by
the proxies on the new meeting date as well,  unless you have revoked your proxy
prior to that time.

VOTING CHOICES

     For each proposal presented, you may vote one of the following ways:

     1.   For the proposal
     2.   Against the proposal
     3.   Abstain from voting

     Proxies that are signed and returned with no instructions will be voted FOR
election of all Director nominees.

CHANGING YOUR VOTE

     You may  change  your vote at any time  before  the proxy is  exercised.  A
shareholder can revoke a proxy by:

     *    Delivering to our executive offices, to the attention of our corporate
          Secretary  prior  to  the  vote  at  the  Annual  Meeting,  a  written
          instrument  of  revocation  bearing a date  later than the date of the
          proxy.

     *    Duly  executing  and  delivering  to  our  executive  offices,  to the
          attention of our corporate  Secretary  prior to the vote at the Annual
          Meeting, a proxy relating to the same shares bearing a later date.

     *    Voting by ballot at the Annual Meeting,  provided that the shareholder
          notifies our corporate  Secretary at the Annual  Meeting of his or her
          intention  to vote in  person at any time  prior to the  voting of the
          proxy.

HOW VOTES ARE COUNTED

     Inspectors  of  election  will be  appointed  for the Annual  Meeting.  The
inspectors  of election  will  determine  whether or not a quorum is present and
will  tabulate  votes cast by proxy or in person at the Annual  Meeting.  If you
have returned valid proxy  instructions  or attend the Annual Meeting in person,
your Common Stock will be counted for the purpose of  determining  whether there
is a  quorum.  If a  broker  indicates  on the  proxy  that  it  does  not  have
discretionary  authority as to certain  shares to vote on a  particular  matter,
those shares will not be considered as present and entitled to vote with respect
to that  matter.  Abstentions  and  broker  non-votes  will be  included  in the
determination of the number of shares represented for a quorum.

COST OF THIS PROXY SOLICITATION

     We will  pay the  cost of  preparing  and  mailing  the  Notice  and  Proxy
Statement,  including  the charges and  expenses of brokerage  firms,  banks and
others who  forward  solicitation  material to  beneficial  owners of the Common
Stock.  We will  solicit  proxies  by mail.  Proxies  may also be  solicited  by
officers and  directors of the Company  personally or by telephone or facsimile,
without  additional   compensation.   Computershare  will  serve  as  our  proxy
solicitation  agent.  In  such  capacity,   Computershare  will  coordinate  the
distribution of proxy materials to beneficial owners of Common Stock and oversee
the return of proxy  cards.  The fee for all these  services is  estimated to be
approximately $5,000.

ANNUAL REPORT

     The  Company's  Annual  Report to  Shareholders  for the fiscal  year ended
September  30, 2002  ("Annual  Report")  has been mailed  concurrently  with the
mailing of the Notice of Annual Meeting and Proxy Statement to all  shareholders
entitled to notice of and to vote at the Annual  Meeting.  The Annual  Report is
not  incorporated  into  this  Proxy  Statement  and  is  not  considered  proxy
soliciting material.

     The  information  contained in the "Report of the  Compensation  and Option
Committee,"  "Audit  Committee  Report," and  "Comparison of Stock  Performance"
below shall not be deemed "filed" with the Securities and Exchange Commission or
subject to  Regulations  14A or 14C or to the  liabilities  of Section 18 of the

                                       2

Securities  Exchange Act of 1934, and shall not be deemed to be  incorporated by
reference into any filing under the Securities Act of 1933 or the Securities Act
of 1934.

                 WHAT VOTE IS REQUIRED TO APPROVE EACH PROPOSAL?


                                            
     Proposal 1:   Election of Four Directors     The four  nominees  for  director who receive
                                                  the most  votes will be  elected.  Cumulative
                                                  voting  is  allowed   with   respect  to  the
                                                  election of directors.


                                    PROPOSALS

                    PROPOSAL NO. 1 --- ELECTION OF DIRECTORS

NUMBER OF DIRECTORS TO BE ELECTED

     Our Board of Directors currently consists of four members.  Until his death
on August 25, 2002,  Donald F. Johnston  served as the fifth member of our Board
of Directors.  Following Mr. Johnston's death, our Board of Directors determined
to reduce the size of our Board of Directors to four members  until such time as
a  qualified  candidate  could be found to replace  Mr.  Johnston.  The  Company
expects to complete  its  candidate  search by the May 2003 Board of  Directors'
meeting.

     Each director  elected will hold office for one year or until his successor
is elected and  qualified.  If any  director  resigns or  otherwise is unable to
complete  his term in  office,  our  Board may elect  another  director  for the
remainder of the resigning director's term.

VOTE REQUIRED

     The four nominees  receiving the highest number of votes cast at the Annual
Meeting  will  be  elected.  There  is  cumulative  voting  in the  election  of
directors.  This means  that each  shareholder  present  at the Annual  Meeting,
either  in person or by  proxy,  will have an  aggregate  number of votes in the
election  of  directors  equal to four (the  number  of  persons  nominated  for
election as directors) multiplied by the number of shares of Common Stock of the
Company held by such  shareholder  on the Record Date.  The resulting  aggregate
number of votes may be cast by the  shareholder  for the  election of any single
nominee, or the shareholder may distribute such votes among any number or all of
the nominees.  The four nominees  receiving the highest  number of votes will be
elected to our Board of Directors.

NOMINEES OF THE BOARD

     Our Board of  Directors  is  responsible  for  supervision  of the  overall
affairs of the Company.  Our Board has nominated the  following  individuals  to
serve on our Board of Directors for the following year:

          Jong S. Whang
          Robert T. Hass
          Alvin Katz
          Bruce R. Thaw

     All of these nominees are currently serving on our Board of Directors. Each
of the nominees has agreed to be named in this Proxy  Statement  and to serve if
elected. See below for information regarding each of the nominees listed above.

                                       3

     Our  Board of  Directors  recommends  a vote FOR the  election  of the four
nominees  under  Proposal  No. 1. Our  Board of  Directors  intends  to vote its
proxies  for the  election  of the  nominees,  for a term to  expire at the next
Annual Meeting.  In that regard,  our Board of Directors  solicits  authority to
cumulate such votes.

     If any nominee should become unavailable for any reason, which our Board of
Directors  does not  anticipate,  the  proxy  will be voted  for any  substitute
nominee or nominees who may be selected by our Board of Directors prior to or at
the Annual  Meeting.  The  information  concerning  the nominees and their share
holdings in the Company has been furnished by them to the Company.

INFORMATION CONCERNING DIRECTORS AND OFFICERS

     The  following  table sets forth  information  regarding  the  officers and
directors   (who  are  also  director   nominees)  of  the  Company,   including
biographical data for at least the last five years.

     NAME                AGE    POSITION WITH THE COMPANY
     ----                ---    -------------------------

     Jong S. Whang       57     President, Chief Executive Officer and Director
     Robert T. Hass      52     Vice President-Finance, Chief Financial Officer,
                                Treasurer, Secretary and Director
     Alvin Katz          73     Director
     Bruce R. Thaw       50     Director

     JONG S. WHANG has been President, Chief Executive Officer and a Director of
the  Company  since  its  inception  and was one of its  founders.  Mr.  Whang's
responsibilities  as  President  include  the  sales  effort  for the  Company's
semiconductor  equipment  business and  development of new products and business
opportunities in that industry.  He has twenty-eight  years of experience in the
semiconductor   industry,   including   time  spent  in  both   processing   and
manufacturing of equipment components and systems.  From 1973 until 1979, he was
employed by Siltronics,  Inc.,  initially as a technician  working with chemical
vapor  deposition  and later as  manager of the  quartz  fabrication  plant with
responsibility of providing technical  marketing support.  From 1979 until 1981,
he was employed by U.S. Quartz,  Inc. as manufacturing  manager. In 1981 he left
U.S. Quartz to form the Company.

     ROBERT T. HASS has been Vice  President-Finance,  Chief Financial  Officer,
Treasurer and  Secretary of the Company since June 3, 1992.  Mr. Hass has served
as a Director of the Company since February 29, 1996.  From 1991 until May 1992,
he operated a financial  consulting  practice  under the name of Hass  Financial
Consulting  Services.  From  1985 to  1991,  Mr.  Hass  served  as  Director  of
Accounting  Services and then Controller for Lifeshares  Group,  Inc., a holding
company  that  owned  and  operated  real  estate   development   and  insurance
subsidiaries,  and from 1988 to 1991 served as Controller  and Chief  Accounting
Officer of some of Lifeshares Group's subsidiaries. From 1984 to 1985, he served
as Vice  President-Finance  and Treasurer of The Victorio  Company,  a privately
owned holding company which owned and operated agriculture, chemical, commercial
real estate  brokerage,  marketing  research and commodities  futures  brokerage
businesses.  From 1977 to 1984, he was employed in various capacities  including
Vice President,  Chief Financial  Officer and Treasurer by Altamil  Corporation,
then  a  public  company,   which  manufactures   truck  equipment,   wire-bound
containers,  and precision aluminum forgings. From 1972 to 1977, he was employed
as an auditor with Ernst & Ernst,  now known as Ernst & Young. He is a Certified
Public Accountant.

     ALVIN KATZ has been a Director of the Company since May 1, 1995.  From 1981
to 1997,  he was an adjunct  professor  of  business  management  at the Florida
Atlantic University in Boca Raton, Florida. From 1991 until the company was sold
in September 1992, he was Chief Executive Officer of Odessa Engineering Corp., a
company engaged in the manufacture of pollution monitoring equipment.  From 1957
to 1976, Mr. Katz held various managerial  positions with United Parcel Service,
including  District  Manager  and  Corporate  Manager  of  Operations  Planning,
Research  and  Development.  He is also a  Director  of  Nastech  Pharmaceutical
Company,  Inc., a company  engaged in  research,  development  and  marketing of
nasally delivered pharmaceuticals. From 1994 to 2002, Mr. Katz was a Director of
Blimpie  International,  a fast food franchiser.  From 1999 to 2000, he was also
President of BMAC, a biomedical automation company.

                                       4

     BRUCE R. THAW has been a Director  of the  Company  since May 1, 1995.  Mr.
Thaw is currently  the  President and Chief  Executive  Officer of  Bulbtronics,
Inc.,  a national  distributor  of technical  and  specialty  light  sources and
related products.  Mr. Thaw is a practicing attorney and was admitted to the bar
of the State of New York in 1978 and the California  State Bar in 1983. Mr. Thaw
is also a director of SafeNet,  Inc., a publicly  traded  company that  designs,
manufactures and markets  computer  network  security systems and products,  and
Nastech Pharmaceutical  Company, Inc., a publicly traded company engaged in drug
delivery technology. Mr. Thaw does not render legal services to the Company.

INFORMATION ABOUT BOARD AND COMMITTEE MEETINGS AND DIRECTOR COMPENSATION

     Our Board of  Directors  held five (5)  meetings  during  fiscal  2002.  No
director  attended less than 75% of all Board  meetings  while he served as such
director  or less  than 75% of all  committee  meetings  on which he served as a
committee  member.  Our Board has the authority  under the  Company's  Bylaws to
increase or decrease the size of our Board and fill vacancies, and the directors
chosen to fill such  vacancies  will hold office until the Company's next annual
meeting or until their successors are elected and qualified.

     The Audit Committee,  the Compensation and Option Committee and the Finance
Committee  are  the  standing  committees  of  our  Board  of  Directors.  These
committees are comprised as follows:

                                    COMPENSATION
         AUDIT(1)                  AND OPTION(1)                  FINANCE
         --------                  -------------                  -------

         A. Katz                                                  A. Katz
       B. R. Thaw                     A. Katz                   B. R. Thaw

----------
(1)  Mr. Donald F.  Johnston  served as a member of these  committees  until his
     death on August 25, 2002. Our Board of Directors expects that any candidate
     subsequently  elected  to our  Board  will be  appointed  to serve on these
     committees.

     The Audit Committee held ten (10) meetings during the 2002 fiscal year. The
Audit Committee is responsible for maintaining  communication between our Board,
the  Company's  independent  auditors and members of financial  management  with
respect to the  Company's  financial  affairs in  general,  including  financial
statements and audits,  the adequacy and effectiveness of the Company's internal
accounting  controls  and  systems  and the  retention  and  termination  of the
independent auditors.

     The Audit  Committee is composed of outside  directors who are not officers
or employees of the Company or its subsidiaries. In the opinion of our Board and
as  "independent" is defined under the listing rules of the Nasdaq Stock Market,
these directors are independent of management and free of any relationship  that
would  interfere with their exercise of independent  judgment as members of this
committee.

     The  Compensation and Option Committee held one (1) meeting during the 2002
fiscal  year.  The  Compensation  and  Option  Committee  makes  recommendations
concerning officer compensation, employee benefit programs and retirement plans.

     The  Finance  Committee  did not hold any  meetings  during the 2002 fiscal
year. The Finance Committee is responsible for communication  between our Board,
the Company's  lender or prospective  lender(s) and other financial  sources and
members of financial management.

     All current  committee members are expected to be nominated for re-election
at a Board meeting to be held following the Annual Meeting of Shareholders.

                                       5

DIRECTORS' COMPENSATION

     Directors who are full-time  employees of the Company receive no additional
compensation  for serving as  directors.  Directors who are not employees of the
Company  receive an annual retainer of $6,000 and fees of $700 per Board meeting
attended  and $250 per  committee  meeting  attended.  In  addition,  under  the
Company's  Non-Employee  Directors  Stock  Option Plan,  each  outside  director
receives an annual grant of options to purchase  5,000  shares of Common  Stock.
The  exercise  price of the  options is set at the fair  market  value of Common
Stock on the date of grant.  Each  option  has a term of ten  years and  becomes
exercisable in three equal  installments  commencing on the first anniversary of
the  date  of  grant  and  continuing  for  the  two  successive   anniversaries
thereafter.  In the event of disability  (as defined in the plan) or death of an
outside director,  all options remain  exercisable for a period of twelve months
following the date such person  ceased to be a director,  but only to the extent
such option was exercisable on the date the director ceased to be a director.

COMPENSATION COMMITTEE INTERLOCKS AND INSIDER PARTICIPATION

     The Compensation  and Option  Committee is presently  composed of Mr. Katz.
Mr. Johnston also served on the  Compensation  Committee prior to his death. Mr.
Katz is not, and Mr. Johnston was not, an officer or employee of the Company.

                             EXECUTIVE COMPENSATION

     The following table sets forth  information  regarding annual and long-term
compensation for services  rendered to the Company during the fiscal years ended
September 30, 2002, 2001 and 2000 by the Company's  Chief Executive  Officer and
the other most highly compensated  executive officer of the Company who received
annual compensation  exceeding $100,000 during such periods  (collectively,  the
"Named Executive Officers").

                           SUMMARY COMPENSATION TABLE



                                                                               LONG-TERM
                                           ANNUAL COMPENSATION(1)            COMPENSATION
                                   --------------------------------------    ------------
     NAME AND          FISCAL                                OTHER ANNUAL     RESTRICTED       ALL OTHER
PRINCIPAL POSITION      YEAR       SALARY(2)    BONUS(3)     COMPENSATION    STOCK AWARDS    COMPENSATION(4)
------------------      ----       ---------    --------     ------------    ------------    ---------------
                                                                            
Jong S. Whang           2002     $ 150,722      $  11,085         --              --          $      --
President and Chief     2001       168,044         69,397         --              --             16,656
Executive Officer       2000       175,817        122,622         --              --              1,242

Robert T. Hass          2002     $ 102,000      $  18,000         --              --          $      --
Vice President-         2001       111,059          1,468         --              --              2,911
Finance                 2000        99,750          9,500         --              --                615


----------
(1)  Neither Messrs.  Whang nor Hass received  personal  benefit  perquisites in
     excess of the lesser of $50,000 or 10% of their aggregate salary and bonus.

(2)  Effective  March 15, 2001,  Mr. Whang  entered into a five year  employment
     agreement with the Company.  The agreement  specifies an annual base salary
     of $188,402. For fiscal 2000, this column includes an accrued retrospective
     salary  increase of $14,250.  As of April 1, 2001,  Mr.  Whang  voluntarily
     reduced  his annual  salary by 20% to  $150,722  and Mr.  Hass  voluntarily
     reduced his annual salary by 15% to $102,000.

(3)  See  "Employment  Agreements"  below for a description  of how Mr.  Whang's
     incentive  compensation is determined.  The amount reflected in this column
     in fiscal 2000 for Mr. Whang includes a discretionary  bonus of $32,550, in
     addition to the $89,716 in incentive compensation earned by Mr. Whang under
     his February 1997 employment agreement.

(4)  Amounts  for   Messrs.   Whang  and  Hass   consist  of  Company   matching
     contributions  in the Amtech Systems,  Inc. 401(k) Plan. The amount for Mr.
     Whang also includes a payment made in lieu of vacation.

                                       6

OPTION GRANTS

     The following  table  contains  information  regarding  stock option grants
during the 2002 fiscal year to the Named Executive Officers.

                       OPTIONS GRANTS IN LAST FISCAL YEAR



                                        INDIVIDUAL GRANTS
                  -----------------------------------------------------------------       POTENTIAL REALIZABLE VALUE
                                  % OF TOTAL                   STOCK                   AT ASSUMED ANNUAL RATES OF STOCK
                  SECURITIES        OPTIONS                  PRICE ON                         PRICE APPRECIATION
                  UNDERLYING      GRANTED TO     EXERCISE     DATE OF                         FOR OPTION TERM (3)
                   OPTIONS         EMPLOYEES       PRICE       GRANT     EXPIRATION    --------------------------------
     NAME          GRANTED      IN FISCAL 2001   ($/SHARE)   ($/SHARE)      DATE        0%           5%           10%
     ----          -------      --------------   ---------   ---------      ----       ----         ----         ----
                                                                                      
Robert T. Hass     5,000(1)          11.1%       $4.50(2)     $4.50       7/19/12      -0-       $ 14,150     $ 35,859


----------
(1)  All options were  granted to Mr. Hass on July 19, 2002 under the  Company's
     1998 Stock Option Plan. The options granted become  exercisable as follows:
     20% on July 19, 2003 and an  additional  20% on each  one-year  anniversary
     thereafter.

(2)  The exercise price was set at 100% of closing price of the Company's Common
     Stock on grant day,  July 19,  2002,  as  reported  on the NASDAQ  National
     Market.

(3)  Reflects  the value of the stock  option on the date of grant  assuming (i)
     for the 0% column,  no  appreciation  in the Company's stock price from the
     date of grant over the term of the option,  (ii) for the 5% column,  a five
     percent annual rate of  appreciation  in the Company's stock price over the
     term of the option, and (iii) for the 10% column, a ten percent annual rate
     of  appreciation  in the Company's stock price over the term of the option,
     in each case without any discounting to present value. The actual gains, if
     any, on stock option exercises are dependent upon the future performance of
     the Company's  Common  Stock.  Accordingly,  the amounts  reflected in this
     table may not necessarily be indicative of the actual results obtained.

OPTION EXERCISES

     There were no exercises of stock  options  during fiscal 2002 by any of the
Named Executive Officers.

EMPLOYMENT AND SEVERANCE AGREEMENTS

     On March 15,  2001,  the Company  entered  into a five (5) year  employment
agreement with its President,  Jong S. Whang.  Under the terms of the agreement,
Mr.  Whang is entitled to an annual  base  salary of  $188,402,  and base salary
increases of at least 5% to be  determined  by our Board of Directors at the end
of each year of the  agreement.  Mr.  Whang is also  entitled to receive  annual
incentive cash compensation of up to 50% of his base salary, based on the follow
criteria:  (i) a bonus equal to 2% of the annual  earnings of the Company before
taxes and  extraordinary  items,  and (ii) a bonus  equal to 2% of the amount by
which the  revenues of the Company for the  applicable  fiscal year exceeds such
revenues for the previous  fiscal  year.  In addition,  Mr. Whang was granted an
option to purchase  150,000  shares of Common Stock  pursuant to the  agreement.
These  options  were  granted on March 15,  2001 and vest at the rate of 20% per
full  year of  service  over a  five-year  period.  To the  extent  not  already
exercisable,   the  options  become   immediately   exercisable  upon:  (i)  the
dissolution  or  liquidation  of the  Company  or a  reorganization,  merger  or
consolidation  in which  all or  substantially  all  prior  shareholders  do not
continue to own more than 60% of the then outstanding shares of Common Stock and
voting  securities,  (ii) the sale of all or substantially  all of the assets of
the Company,  or (iii) the  occurrence  of a change in control of the Company as
discussed in the  agreement.  The agreement  also contains  confidentiality  and
non-compete provisions. Mr. Whang is also entitled to participate in any benefit
plans generally available to employees of the Company.  Finally,  the Company is
required to purchase a $250,000 life insurance  policy on the life of Mr. Whang,
with his spouse as the beneficiary of such policy. To date, Mr. Whang has waived
the Company's compliance with the latter requirement.

                                       7

SEVERANCE AND CHANGE OF CONTROL PROVISIONS

     If Mr.  Whang is  terminated  other than for "cause" or he  terminates  his
employment  for "good  reason"  (as such  terms are  defined  in his  employment
agreement),  he is entitled to receive,  as  severance  pay,  salary,  incentive
compensation  and  vacation  accrued  through the date of  termination  plus the
following: (i) an amount equal to two years of Mr. Whang's base salary in effect
on the  termination  date;  (ii) a pro-rated  portion of the amount of incentive
compensation  Mr. Whang would earn for the fiscal year in which the  termination
occurs if the  results of  operations  of the  Company  for the period  from the
beginning of such fiscal year to the  termination  date were  annualized;  (iii)
full vesting of all stock options  issued under the  employment  agreement;  and
(iv) vesting of a pro-rated  portion of the number of stock  options which would
have vested for the fiscal year in which the termination occurs.

     Mr.  Whang's  employment  agreement  also provides for benefits  should his
employment with the Company be terminated  following a change in control. If Mr.
Whang's  employment with the Company is terminated within one year following the
occurrence  of a change of control,  either by the Company for any reason  other
than for cause or by Mr. Whang for good reason, the Company would be required to
pay him a lump sum  payment  equal to three  years of his annual  base salary in
effect on the termination date and the maximum amount of incentive  compensation
which he could earn for the fiscal year in which the termination date occurs. In
addition, all stock options held by him but not vested would vest immediately.

CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS

     The  Company  did not have any  transactions  during  fiscal  2002 with any
director,  director  nominee,  executive  officer,  security holder known to the
Company to own of record or  beneficially  more than 5% of the Company's  Common
Stock, or any member of the immediate family of any of the foregoing persons, in
which the amount involved exceeded $60,000.

                   REPORT OF COMPENSATION AND OPTION COMMITTEE

     The  Compensation  and Option Committee of the Company's Board of Directors
(the "Committee"), which is composed entirely of independent, outside directors,
establishes  the general  compensation  policies  of the  Company  and  specific
compensation  for each executive  officer of the Company,  and  administers  the
Company's  stock  option  program.  The  Committee's  objective  is to make  the
compensation  packages of the  executive  officers of the Company  sufficient to
attract and retain  persons of  exceptional  quality,  and to provide  effective
incentives to motivate and reward Company executives for achieving the financial
and strategic goals of the Company essential to the Company's  long-term success
and growth in shareholder value. The Company's  executive  compensation  package
consists of three main components: base salary, incentive cash bonuses and stock
options.

BASE COMPENSATION

     The Committee's  approach is to offer executives salaries  competitive with
those of other executives in the industry in which the Company operates. To that
end, the  Committee  evaluates the  competitiveness  of its base salary based on
information drawn from a variety of sources, including published and proprietary
survey  data  and  the  Company's  own   experience   recruiting  and  retaining
executives,   although  complete  information  is  not  easily  obtainable.  The
Company's  base salary  levels are intended to be  consistent  with  competitive
practice  and  level  of  responsibility,   with  salary  increases   reflecting
competitive  trends,  the overall  financial  performance of the Company and the
performance of the individual executive.

BONUSES

     In  addition  to  base  salary,   executives  are  eligible  to  receive  a
discretionary annual bonus. At the beginning of each year, the Committee and the
Chief  Executive  Officer (the "CEO")  review each  individual  executive's  job
responsibilities  and goals for the upcoming  year.  The amount of the bonus and
any performance criteria vary with the position and role of the executive within
the  Company.  In  addition,  for all  executives,  the  Committee  reviews  the
Company's  actual  financial   performance   against  its  internally   budgeted
performance in determining year-end bonuses, if any. However, the Committee does

                                       8

not set  objective  performance  targets for  executives  other than the CEO and
sales and marketing personnel.

STOCK OPTION AND RESTRICTED STOCK GRANTS

     The  Company,  from  time to time,  grants  stock  options  and  shares  of
restricted stock in order to provide certain executives with a competitive total
compensation  package and to reward them for their contribution to the long-term
price  performance  of the Company's  Common Stock.  Grants of stock options and
restricted stock are designed to align the executive's interest with that of the
shareholders  of the Company.  In awarding  option  grants,  the Committee  will
consider,  among other things, the amount of stock and options presently held by
the executive,  the  executive's  past  performance and  contributions,  and the
executive's anticipated future contributions and responsibilities.

2002 CEO COMPENSATION

     Mr. Whang, the CEO, is paid an annual base salary of $188,402,  pursuant to
the terms of his March 15,  2001  employment  agreement  with the  Company.  Mr.
Whang's  increased base salary is based upon the  compensation  of executives in
comparable positions in the semiconductor industry, adjusted for the size of the
Company (total assets and revenues).

     In connection with the execution of Mr. Whang's employment  agreement,  our
Board of Directors  approved an incentive  compensation  plan for the CEO, which
provides  for an annual  cash bonus  equal to 2% of the annual  earnings  of the
Company before taxes and extraordinary items, plus 2% of the amount by which the
revenues of the Company in an  applicable  fiscal year exceed such  revenues for
the previous  fiscal  year.  The total of such cash bonuses is limited to 50% of
Mr. Whang's base salary for the applicable fiscal year. Mr. Whang earned a bonus
of $11,085 in 2002 pursuant to such  incentive  compensation  plan.  Mr. Whang's
employment  agreement with the Company  incorporates the incentive  compensation
plan described above. See "Employment and Severance Agreements," above.

                                      RESPECTFULLY SUBMITTED,

                                      Alvin Katz


                             AUDIT COMMITTEE REPORT

     In accordance with its written charter adopted by our Board of Directors on
June 1, 2000, a copy of which was attached as an exhibit to the Company's  Proxy
Statement for its 2001 Annual Meeting of  Shareholders,  the Audit  Committee is
responsible for reviewing and discussing the audited  financial  statements with
management,  discussing with the Company's auditors  information relating to the
auditors'  judgments about the quality of the Company's  accounting  principles,
recommending  to our Board of  Directors  that the  Company  include the audited
financials in its Annual Report on Form 10-K and overseeing  compliance with the
Securities  and Exchange  Commission  requirements  for  disclosure of auditors'
services and activities.

REVIEW OF AUDITED FINANCIAL STATEMENTS

     The Audit  Committee  has reviewed  the  Company's  consolidated  financial
statements for the fiscal year ended  September 30, 2002, as audited by KPMG LLP
("KPMG"),  the Company's independent auditors, and has discussed these financial
statements with management.  In addition, the Audit Committee has discussed with
KPMG the matters required to be discussed by Statement of Auditing Standards 61,
"Communications  with Audit  Committees."  Furthermore,  the Audit Committee has
received  the  written  disclosures  and the letter  from KPMG  required  by the
Independence  Standards  Board  Standard No. 1 and has  discussed  with KPMG its
independence.

                                       9

RECOMMENDATION

     Based  upon the  foregoing  review  and  discussion,  the  Audit  Committee
recommended to our Board of Directors that the audited financial  statements for
the fiscal year ended  September 30, 2002,  be filed with the  Company's  annual
report on Form 10-K for such period.

                                           RESPECTFULLY SUBMITTED,

                                           Alvin Katz
                                           Bruce R. Thaw


DISCLOSURE OF AUDIT AND NON-AUDIT FEES

AUDIT FEES

     The fees billed by Arthur  Andersen LLP (the Company's  auditors until July
2002)  and KPMG (the  Company's  current  auditors)  for  professional  services
rendered for the audit of the  Company's  annual  financial  statements  for the
fiscal  year  ended  September  30,  2002 and for the  review  of the  financial
statements  included  in the  Company's  Quarterly  Reports on Form 10-Q for the
fiscal year ended September 30, 2002 were $18,000 and $105,000, respectively.

FINANCIAL INFORMATION SYSTEMS DESIGN AND IMPLEMENTATION FEES

     During  fiscal  2002,  the  Company did not engage its  independent  public
accountants to perform financial information systems design and implementation.

ALL OTHER FEES OF INDEPENDENT PUBLIC ACCOUNTANTS

     During  fiscal 2002,  all other fees of the  Company's  independent  public
accountants  amounted to $4,985, which primarily consisted of accounting and tax
consultation services.

     The  Audit  Committee  of our Board of  Directors  considered  whether  the
provision of non-audit  services is consistent  with  maintaining  the auditors'
independence.

         SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT

     The  following  table  sets  forth  certain   information   concerning  the
beneficial ownership of the Company's Common Stock as of January 7, 2003, by (i)
each  director  of the  Company,  (ii) each  executive  officer of the  Company,
including  the Named  Executive  Officers,  (iii)  all  executive  officers  and
directors  of the Company as a group,  and (iv) each person known to the Company
to be the beneficial owner of more than 5% of the Company's  Common Stock.  This
information  was  determined in accordance  with Rule 13d-3 under the Securities
Exchange Act of 1934, as amended, and is based upon the information furnished by
the persons listed below. Except as otherwise indicated, each shareholder listed
possesses sole voting and investment  power with respect to the shares indicated
as being beneficially owned.

                                       10

                                               NUMBER OF SHARES      PERCENT OF
      NAME AND ADDRESS (1)(2)               BENEFICIALLY HELD (3)  OWNERSHIP (3)
      -----------------------               ---------------------  -------------
      Jong S. Whang                               156,972(4)           5.7%
      Robert T. Hass                               10,375(5)              *
      Alvin Katz                                   82,667(6)           3.1%
      Bruce R. Thaw                                18,667(6)            *
      Directors and Executive Officers of
        the Company as a group (5 persons)        268,681(7)          10.0%

      5% STOCKHOLDERS:
      Robert Sussman
      520 Madison Avenue
      41st Floor
      New York, NY  10022                         202,500(8)           7.5%

----------
* Less than 1%.

(1)  Except as otherwise noted, the address for each person listed in this table
     is c/o Amtech Systems, Inc., 131 South Clark Drive, Tempe, Arizona 85281.

(2)  Mr. Whang is the Company's President,  CEO and a director.  Mr. Hass is the
     Vice President-Finance, Chief Financial Officer, Treasurer, Secretary and a
     director. Messrs. Katz and Thaw are presently directors.

(3)  The share amounts and percentages  shown include the shares of Common Stock
     actually  owned as of January 7, 2003,  and the shares of Common Stock with
     respect to which the person had the right to acquire  beneficial  ownership
     within 60 days of such date pursuant to options or warrants.  All shares of
     Common Stock that the identified  person had the right to acquire within 60
     days of January 7,  2003,  upon the  exercise  of options or  warrants  are
     deemed to be  outstanding  when  computing the percentage of the securities
     owned by such person,  but are not deemed to be outstanding  when computing
     the percentage of the securities owned by any other person. The amounts and
     percentages are based upon 2,689,571 shares of Common Stock  outstanding as
     of January 7, 2003.

(4)  Includes (i) 9,488 shares held  jointly  with Mr.  Whang's  spouse and (ii)
     72,517 shares issuable upon the exercise of presently  exercisable options;
     41,517  shares  issuable  at an exercise  price of $1.126 per share;  1,000
     shares issuable at an exercise price of $1.50 per share; and the balance of
     30,000 shares issuable at an exercise price of $6.53 per share.

(5)  Includes  10,250 shares  issuable  upon  exercise of presently  exercisable
     options;  5,250 shares  issuable at an exercise  price of $1.126 per share;
     and the balance of 5,000 shares  issuable at an exercise price of $5.88 per
     share.

(6)  Includes  18,667 shares  issuable  upon  exercise of presently  exercisable
     options;  11,000 shares  issuable at an exercise price of $1.126 per share;
     3,000 shares issuable at an exercise price of $1.50 per share; 3,000 shares
     issuable at an exercise price of $6.813 per share; and the balance of 1,667
     shares issuable at an exercise price of $5.88 per share.

(7)  Includes  120,100  shares  issuable upon exercise of presently  exercisable
     options;  70,767 shares  issuable at an exercise price of $1.126 per share;
     5,000 shares issuable at an exercise price of $1.50 per share; 6,000 shares
     issuable at an exercise price of $6.813 per share;  30,000 shares  issuable
     at an exercise  price of $6.53 per share;  and the balance of 8,333  shares
     issuable at an exercise price of $5.88 per share.

(8)  Includes 2,500 shares jointly owned with Mr. Sussman's spouse.

                                       11

COMPLIANCE WITH SECTION 16(a) OF THE SECURITIES EXCHANGE ACT OF 1934

     Section 16(a) of the Securities Exchange Act of 1934, as amended,  requires
the Company's directors and executive officers,  as well as persons beneficially
owning more than 10% of the Company's  outstanding Common Stock, to file certain
reports of ownership  with the Securities  and Exchange  Commission  (the "SEC")
within  specified time periods.  Such officers,  directors and  shareholders are
also  required by SEC rules to furnish  the  Company  with copies of all Section
16(a) forms they file.

     Based  solely on its review of such forms  received by it during the fiscal
year ended September 30, 2002, or written representations from certain reporting
persons,  the Company  believes  that between  October 1, 2001 and September 30,
2002 all Section 16(a) filing requirements applicable to its officers, directors
and 10% shareholders were complied with.

COMPARISON OF STOCK PERFORMANCE

     The following  line graph compares  cumulative  total  stockholder  return,
assuming reinvestment of dividends,  for: the Company's Common Stock, the NASDAQ
Composite Index and the NASDAQ Industrial Index. Because the Company did not pay
dividends on its Common Stock during the measurement  period, the calculation of
the cumulative  total  stockholder  return on the Company's Common Stock did not
include dividends. The following graph assumes that $100 was invested on October
1, 1997.

                            9/30/97  9/30/98  9/30/99  9/30/00  9/30/01  9/30/02
                            -------  -------  -------  -------  -------  -------
AMTECH SYSTEMS, INC          $100     $ 28     $ 37     $279     $ 92     $ 58
NASDAQ COMPOSITE INDEX       $100     $100     $163     $218     $ 89     $ 70
NASDAQ Industrial Index      $100     $ 75     $117     $149     $ 79     $ 68

           CHANGE IN AND DISAGREEMENTS WITH ACCOUNTANT ON ACCOUNTING
                            AND FINANCIAL DISCLOSURE

     On July 3, 2002,  the Company  dismissed its  independent  auditor,  Arthur
Andersen LLP  ("Andersen"),  and appointed KPMG as its new independent  auditor.
These  actions  were  approved  by the  Company's  Board of  Directors  upon the
recommendation  of its  Audit  Committee.  KPMG has  reviewed  the  consolidated
financial  statements  of the Company  for the  quarter  ended June 30, 2002 and
audited the consolidated financial statements of the Company for the fiscal year
ended September 30, 2002.

     During the two fiscal  years ended  September  30,  2001 and 2000,  and the
subsequent interim periods up to the date of Andersen's dismissal, there were no
disagreements  between  the  Company  and  Andersen,  as  defined in Item 304 of
Regulation S-K, on any matter of accounting  principles or practices,  financial
statement disclosure,  or auditing scope or procedure,  which disagreements,  if
not  resolved to  Andersen's  satisfaction,  would have caused  Andersen to make
reference to the subject  matter of such  disagreement  in  connection  with its
reports,   and  there  were  no  reportable   events  as  described  under  Item
304(a)(1)(v) of Regulation S-K.

                                       12

     The audit reports of Andersen on the consolidated  financial  statements of
the Company for each of the fiscal years ended  September  30, 2001 and 2000 did
not contain an adverse opinion or disclaimer of opinion, nor were they qualified
or modified as to uncertainty, audit scope or accounting principles.

     During  the  fiscal  years  ended  September  30,  2001 and  2000,  and the
subsequent interim periods through the date of Andersen's dismissal, neither the
Company nor anyone on its behalf  consulted with KPMG regarding the  application
of  accounting  principles  to a  specified  transaction,  either  completed  or
proposed,  or the type of audit  opinion that might be rendered on the Company's
consolidated financial statements, or any other matters or reportable events set
forth in Items 304(a)(2)(i) and (ii) of Regulation S-K.

     The  Company  previously  provided  Andersen  with a copy of the  foregoing
disclosures  when the Company filed a Current  Report on Form 8-K disclosing the
dismissal of Andersen. Andersen has advised the Company that as of July 1, 2002,
it is no longer issuing any letters to the  Securities  and Exchange  Commission
regarding matters such as these.

                                  OTHER MATTERS

ANNUAL REPORT

     The Annual  Report of the Company for the fiscal year ended  September  30,
2002, is enclosed herewith.

VOTING BY PROXY

     In order to ensure  that your  shares  will be  represented  at the  Annual
Meeting,  please sign and return the enclosed proxy in the envelope provided for
that purpose,  whether or not you expect to attend. Any shareholder may, without
affecting any vote previously taken, revoke a written proxy by delivering to our
executive offices, to the attention of our corporate Secretary prior to the vote
at the Annual  Meeting,  written  notice of revocation or a duly executed  proxy
bearing a later date, or by attending the Annual Meeting and voting in person.

INDEPENDENT AUDITORS

     Our Board of  Directors  has  selected  KPMG as the  Company's  independent
public  accountants  for the fiscal year ending  September  30,  2003.  KPMG was
selected this year after the Company  terminated  its prior  independent  public
accountants,  Arthur Andersen LLP ("Andersen") in July 2002. A representative of
KPMG is expected to be present at the Annual  Meeting  with the  opportunity  to
make a  statement  if he or she so  desires  and to be  available  to respond to
appropriate questions.

DEADLINE FOR SHAREHOLDER PROPOSALS FOR ACTION AT THE COMPANY'S NEXT ANNUAL
MEETING

     Any shareholder  who wishes to present any proposal for shareholder  action
at the next Annual Meeting of  Shareholders to be held in 2004, must be received
by the Company's  Secretary,  at the Company's offices, not later than September
18, 2003, in order to be included in the Company's  proxy  statement and form of
proxy for that  meeting.  Such  proposals  should be addressed to the  Corporate
Secretary, Amtech Systems, Inc., 131 South Clark Drive, Tempe, Arizona 85281. If
a shareholder  proposal is introduced at the 2004 Annual Meeting of Shareholders
without any discussion of the proposal in the Company's proxy statement, and the
shareholder  does not notify the  Company on or before  December  10,  2003,  as
required by SEC Rule 14(a)-4(c)(1),  of the intent to raise such proposal at the
Annual  Meeting of  Shareholders,  then proxies  received by the Company for the
2004 Annual  Meeting will be voted by the persons named in such proxies in their
discretion with respect to such proposal.  Notice of such proposal is to be sent
to the above address.

                                       13

                         HOUSEHOLDING OF PROXY MATERIALS

     In December 2000, the Securities and Exchange  Commission adopted new rules
that permit companies and intermediaries (e.g., brokers) to satisfy the delivery
requirements  for proxy  statements with respect to two or more security holders
sharing the same address by  delivering a single  proxy  statement  addressed to
those  security  holders.  This  process,  which  is  commonly  referred  to  as
"householding,"  potentially  means extra  convenience for security  holders and
cost savings for companies.

     If you are  currently  receiving  multiple  copies of the  Company's  Proxy
Statement  and  Annual  Report  at  your  address  and  would  like  to  request
householding of your  communications,  please contact your broker. Once you have
elected  householding of your  communications,  householding will continue until
you are notified  otherwise or until you revoke your  consent.  If, at any time,
you no longer wish to participate in householding, and would prefer to receive a
separate Proxy Statement and Annual Report, please notify your broker if you own
shares in street name, or direct your written request to Amtech  Systems,  Inc.,
131 South Clark  Drive,  Tempe,  Arizona  85281,  Attn:  Secretary  if you are a
shareholder of record.

                                        By Order of the Board of Directors

                                        /s/ Robert T. Hass

                                        Robert T. Hass, Secretary

Tempe, Arizona
January 24, 2003

                                       14

--------------------------------------------------------------------------------
PROXY - AMTECH SYSTEMS, INC.
--------------------------------------------------------------------------------

THIS PROXY IS SOLICITED  ON BEHALF OF THE BOARD OF DIRECTORS OF AMTECH  SYSTEMS,
INC. FOR THE ANNUAL MEETING OF SHAREHOLDERS

The undersigned shareholder of Amtech Systems, Inc., an Arizona corporation (the
"Company"),  hereby  acknowledges  receipt  of the  Notice of Annual  Meeting of
Shareholders  dated  January 24,  2003,  and hereby  appoints  Jong S. Whang and
Robert T. Hass, and each or either of them, proxies and attorneys-in-fact,  with
full power of  substitution,  on behalf and in the name of the  undersigned,  to
represent  the  undersigned  at the  Annual  Meeting of  Shareholders  of AMTECH
SYSTEMS,  INC. to be held at the Hilton Phoenix  Airport Hotel,  2435 South 47th
Street,  Phoenix,  Arizona on Friday, February 28, 2003, at 10:00 a.m., Phoenix,
Arizona time, and at any adjournment(s) or postponement(s)  thereof, and to vote
all shares of Common  Stock that the  undersigned  would be  entitled to vote if
then and there personally present, on the matters set forth on the reverse side.

THIS PROXY WHEN PROPERLY EXECUTED WILL BE VOTED IN THE MANNER DIRECTED HEREIN BY
THE UNDERSIGNED  SHAREHOLDER.  IF NO DIRECTION IS MADE, THIS PROXY WILL BE VOTED
FOR THE ELECTION OF THE  NOMINEES  NAMED ON THE REVERSE SIDE AND AS SAID PROXIES
DEEM ADVISABLE ON SUCH MATTERS AS MAY COME BEFORE THE MEETING.

                             000000  0000000000  0  0000
AMTECH SYSTEMS, INC.
                             000000000.000 ext
                             000000000.000 ext
                             000000000.000 ext
                             000000000.000 ext
MR A SAMPLE                  000000000.000 ext
DESIGNATION (IF ANY)         000000000.000 ext
ADD 1                        000000000.000 ext
ADD 2
ADD 3                        HOLDER ACCOUNT NUMBER
ADD 4
ADD 5                        C 1234567890                J N T
ADD 6
                             [ ]  Mark this box with an X if you have made
                                  changes to your name or address details above.

--------------------------------------------------------------------------------
ANNUAL MEETING PROXY CARD
--------------------------------------------------------------------------------

A  ELECTION OF DIRECTORS
1.   The Board of Directors  recommends a vote FOR the listed  nominees.  In the
     election of directors,  you have an aggregate  number of votes equal to the
     number of shares held in the above  referenced  account  multiplied by four
     (4).  Your votes will be allocated  equally  among the  directors  you have
     voted for, or as marked in the space provided.

                              FOR   WITHHOLD
01 - Jong S. Whang            [ ]     [ ]         ________________ votes
02 - Robert T. Hass           [ ]     [ ]         ________________ votes
03 - Alvin Katz               [ ]     [ ]         ________________ votes
04 - Bruce R. Thaw            [ ]     [ ]         ________________ votes

B  AUTHORIZED SIGNATURES - SIGN HERE - THIS SECTION MUST BE COMPLETED FOR YOUR
INSTRUCTIONS TO BE EXECUTED.

The undersigned agrees that the proxy holder is authorized to cumulate votes in
the election of directors and to vote for less than all of the nominees.

Please sign exactly as your name appears above. When shares are held in common
or in joint tenancy, both should sign. When signing as attorney, as executor,
administrator, trustee or guardian, please give full title as such. If a
corporation, sign in full corporate name by President or other authorized
officer. If a partnership, please sign in partnership name by an authorized
person. Please return in the enclosed, postage-paid envelope.

Signature 1 - Please keep signature within the box
[                                                   ]
[                                                   ]

Signature 2 - Please keep signature within the box
[                                                   ]
[                                                   ]

Date (mm/dd/yyyy)
[             /                   /                 ]
[             /                   /                 ]

                   1UPX    HHH    PPPP    001510